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The book breaks down the complex, multi-step sequence required to manufacture Very Large Scale Integration (VLSI) circuits: Crystal Growth and Epitaxy: How pure silicon ingots are grown and sliced into wafers. Oxidation:

Before we discuss the PDF, we must understand the author. Simon M. Sze (often stylized as S. M. Sze) is a Taiwanese-American physicist who co-invented the floating-gate memory cell—the precursor to today’s Flash memory. During his storied career at Bell Labs and later as a professor at National Chiao Tung University, Sze realized that the semiconductor industry lacked a comprehensive guide to the technology of making chips.